ETCHING,申请号JP19890330518-传众专利搜索

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发明名称	ETCHING
摘要
申请公布号	JPH03190224(A)	申请公布日期	1991.08.20
申请号	JP19890330518	申请日期	1989.12.20
申请人	MATSUSHITA ELECTRIC IND CO LTD	发明人	KATO TOSHIAKI
分类号	H01L21/302;H01L21/3065	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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