发明名称 Bonding method
摘要 A bonding method for bonding inner leads on a film to electrodes of semiconductor elements is performed by the steps of: individually positioning the film and semiconductor elements at a predetermined bonding position; individually recognizing the positions of the inner leads and electrodes; selecting a combination of one inner lead and one electrode which are positionally shifted relative to each other; correcting relative position of the inner lead and electrode which are positionally shifted so that the inner lead and electrode are aligned; the inner lead and electrode are bonded; relative positions of remaining inner leads and elctrodes are aligned; and the inner leads and elctrodes are individually connected by bonding.
申请公布号 US5040293(A) 申请公布日期 1991.08.20
申请号 US19900523398 申请日期 1990.05.14
申请人 KABUSHIKI KAISHA SHINKAWA 发明人 YAMAZAKI, NOBUTO;NISHIMURA, AKIHIRO
分类号 H01L21/60;H01L21/00 主分类号 H01L21/60
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