| 摘要 |
PURPOSE:To eliminate the generation of the stress-strain of a cratch, etc., and to repeatedly perform the micro-destruction of a working face while maintaining the polishing smoothness of the working surface, by forming a functional material having a polishing action in the spherical shape subjected to a spattering vapor deposition on the surface of the core particle that abrasive grains are formed by the high polymer material having an excellent elasticity. CONSTITUTION:The abrasive grains 4 interposed with their feeding between the work surface 3a of the body 3 to be worked set to a rotating head 1 and the pressurizing face 2a of the work tool 2 installed freely movable vertically and freely rotatable, are formed in the spherical shape that the functional material 4b having a polishing action is subjected to a spattering vapor deposition on the surface of the core particule 4a formed by the high polymer material having an excellent elasticity. Then, when a pressing force is given by the descent of this work tool, the abrasive grains are deformed with their deflection in parallel to the pressing force thereof, in the state of giving an elastic stress to the internal part thereby and the sliding contact to the work surface of the body to be worked becomes in a face contact state, interposed between this work surface and work face and polishing is performed according to the rotation of a rotating head. |
