| 摘要 |
PURPOSE:To prevent an adverse effect generating from the heat treatment to be performed for crystallization as well as to obtain the magnetic thin film having an excellent characteristics in vertical magnetization by a method wherein, after a protective film has been formed on the amorphous rare-earth iron-garnet thin film formed on a substrate, a heat treatment is performed. CONSTITUTION:A (Y, Bi)3(Fe, Al)5O2 amorphous thin film 6 is formed on a quartz glass substrate 2 using a sputtering device. Then, after the first target 4 attached to an electrode plate 1 has been replaced with the second target 7 consisting of SiO2, the sputtering device is evacuated to the prescribed degree of vacuum again, then the mixed gas of Ar and O2 is introduced into the sputtering device, glow discharge is started by applying the prescribed high frequency voltage between electrode plates 1 and 3, and an SiO2 film 8 is formed on the thin film 6. Then, the sample of three-layer structure consisting of a quartz glass substrate 2, the thin film 6 and the SiO2 film 8, which are formed as above, is heat-treated at 700 deg.C for 3hr in the air, and the manufacture of the magnetic thin film is completed. |
