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发明名称
FORMING DEVICE
摘要
申请公布号
JPH03190154(A)
申请公布日期
1991.08.20
申请号
JP19890328948
申请日期
1989.12.19
申请人
HITACHI LTD;HITACHI TOKYO ELECTRON CO LTD
发明人
KITANO KENJI
分类号
H01L23/50
主分类号
H01L23/50
代理机构
代理人
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