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发明名称
SEMICONDUCTOR MEMORY AND MANUFACTURE THEREOF
摘要
申请公布号
JPH03188677(A)
申请公布日期
1991.08.16
申请号
JP19890327926
申请日期
1989.12.18
申请人
MATSUSHITA ELECTRON CORP
发明人
SATO KAZUO
分类号
H01L21/8247;H01L27/115;H01L29/788;H01L29/792
主分类号
H01L21/8247
代理机构
代理人
主权项
地址
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