摘要 |
PURPOSE:To stably rotate a probe even when characteristics of the probe are out of their standards by detecting the rotation and stop characteristics of the probe so as to detect the most suitable parameter for controlling the probe. CONSTITUTION:When power is supplied a main control portion 9 starts a test driving signal generating portion 15 and a test driving signal output from the test driving signal generating portion 15 is input to a motor driving portion 7 by a changeover switch 16. When this test driving signal VM is supplied to a motor 6 disposed in a probe 1 a detecting portion 8 for the position and rotational frequency of a piezoelectric vibrator 2 detects the position and the rotational frequency of the vibrator 2 in response to a signal output from an encoder 4 and outputs signals to a detecting portion 17 for the rotating and stop characteristics of the probe 1. According to data on the rotational frequency fP of the probe the detecting portion 17 detects the starting voltage V1 of the motor 6, the rotational frequency f2 of the probe for a reference voltage V2, the time t4 for stabilizing rotation of the motor, the time t5 from the output to the stop of a stopping voltage V3 and the angle theta=theta1-theta2 through which the motor is rotated until it stops, and the like. When these detected outputs are output to a control parameter generating portion 12 the generating portion 12 originates data for making the most suitable control of rotation and stop of the probe and applies the data to a motor control portion 10 so as to control the motor 6. |