发明名称
摘要 PURPOSE:To mount an adjust a reflection type sensor easily by projecting projecting beams from the reflection type sensor from an oblique direction to the side surface of a die and detecting reflected beams by the side surface of the die by the sensor. CONSTITUTION:A reflection type sensor 10 is arranged in the oblique direction, projecting beams 11 are made to collide onto a lead frame 3 in the vicinity of a die 4, and reflected beams 12 obtained by reflecting the reflected beams by the side surface of the die 4 are detected by the reflection type sensor 10. A flat surface can be formed in the side surface of the die, and incidence to the reflection type sensor 10 is acquired easily. Reflected beams 13 in the absence of the die 4 are reflected in the direction separate from the reflection type sensor 10, and are not projected to the reflection type sensor 10, and the presence of the die 4 can be detected positively. Even when projecting beams 11 are made to collide directly with the side surface of the die 4, reflected beams 12 are further obtained by the lead frame 3 from reflected beams from the side surface of the die 4.
申请公布号 JPH0353778(B2) 申请公布日期 1991.08.16
申请号 JP19850079978 申请日期 1985.04.15
申请人 发明人
分类号 H01L21/67;G01B11/00;H01L21/00;H01L21/68 主分类号 H01L21/67
代理机构 代理人
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