摘要 |
PURPOSE: To minimize the disturbance given to a process by perturbing process parameters by impressing a perturbing signal upon a process means and detecting the physical properties of a product affected by the perturbation, and then, calculating dead time by cross-correlating the physical property detecting signals with the perturbing signal. CONSTITUTION: In a process in which a controller 32 controls a processing section 30 based on the signal of a sensor 34, an arbitrary signal 40 which is a perturbing signal from a pseudo binary arbitrary rank signal generator 38 is impressed upon the processing section 30 and the sensor 34 detects the influence of the perturbation on process parameters and transmits the signal 42 detecting the influence to a cross-correlator 44 together with the arbitrary signal 40. The correlator 44 calculates a cross-correlative element from the signals 40 and 42 and finds the dead time which is the time interval from the time at which the signal 40 is impressed upon the section 30 to the time at which the sensor 34 detects the influence of perturbation based on the element. |