| 摘要 |
<p>PURPOSE:To enable quick dismounting operation of an object to be sucked and to improve workability and handling performance of chuck by making a ventilation groove having one open end in the surface of an insulator. CONSTITUTION:A chuck body 21 has C-shaped top view and an arm insertion groove, having one end opened partially to the circumferential face and the other end extending toward the center of the body, is made radially in the chuck body. A plurality of thin grooves 23a-23f having proper width and depth are made radially in the upper face while an organic insulating film 26A composed of polyimide is formed on the upper face of electrodes 24a-24p and between the electrodes, and an inorganic insulating film 26b of alumina or the like is formed thereon. Consequently, mounting/dismounting operation of an object to be sucked can quickly be carried out in the vacuum as well as in the atmosphere, especially dismounting operation in the atmosphere can quickly be carried out, and suction of the object can immediately be released upon application of zero voltage.</p> |
