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经营范围
发明名称
WAFER HANDLING APPARATUS
摘要
申请公布号
JPH03187239(A)
申请公布日期
1991.08.15
申请号
JP19890326957
申请日期
1989.12.15
申请人
FUJITSU LTD
发明人
ISHIKAWA KAZUHIRO
分类号
B25J15/00;B25J15/06;B25J15/08;B65G49/07;H01L21/677;H01L21/68
主分类号
B25J15/00
代理机构
代理人
主权项
地址
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