PROCESS FOR MANUFACTURING A STRUCTURED CERAMIC FILM OR A CERAMIC OBJECT COMPOSED OF SUCH FILMS

摘要

PCT No. PCT/DE88/00250 Sec. 371 Date Oct. 27, 1989 Sec. 102(e) Date Oct. 27, 1989 PCT Filed Apr. 27, 1988 PCT Pub. No. WO88/08360 PCT Pub. Date Nov. 3, 1988.Method for producing structured ceramic films (111) as well as ceramic members (1) manufactured therefrom and having interior cavities (2) upon empolyment of photolithographic structuring and liquid jet erosion (21).