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发明名称
THIN FILM DEPOSITION APPARATUS
摘要
申请公布号
GB9113636(D0)
申请公布日期
1991.08.14
申请号
GB19910013636
申请日期
1991.06.25
申请人
MITSUBISHI DENKI KABUSHIKI KAISHA
发明人
分类号
C23C14/32;C23C14/22;H01J27/14;H01L21/203
主分类号
C23C14/32
代理机构
代理人
主权项
地址
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