发明名称 Interferometer for detecting optical wavelength variations - has waveguides providing measuring arm and 2 reference arms of differing optical wavelength
摘要 The interferometer for detecting optical wavelength variations uses a monochromatic laser light source coupled to a beam splitter for providing measuring and reference beams. The light is fed to the beam splitter and fed back to photodetectors via waveguides formed on a substrate (1) to provide a single measuring arm (7) and 2 reference arms (6,8) with different optical wavelengths providing a phase difference. The photodetectors are coupled to an electronic evaluation stage, for determining the variation in the optical wavelength of the measuring arm (7). Pref. thermooptical, or electrooptical phase modulators operated by a DC signal are associated with the measuring arm (7) and one of the 2 reference arms (6,8). ADVANTAGE - Increased resolution.
申请公布号 DE4103914(A1) 申请公布日期 1991.08.14
申请号 DE19914103914 申请日期 1991.02.08
申请人 DR. JOHANNES HEIDENHAIN GMBH, 8225 TRAUNREUT, DE 发明人 JESTEL, DIETER, DIPL.-PHYS., 4620 CASTROP-RAUXEL, DE;FRANZ, ANDREAS, DR., 8221 KIENBERG, DE;MICHEL, DIETER, 8220 TRAUNSTEIN, DE
分类号 G01B9/02;G01D5/26;G02B6/12;G02F1/025;G02F1/035;G02F1/225 主分类号 G01B9/02
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