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发明名称
DEVELOPER
摘要
申请公布号
JPH03185710(A)
申请公布日期
1991.08.13
申请号
JP19890324434
申请日期
1989.12.14
申请人
MITSUBISHI ELECTRIC CORP
发明人
KAWAI AKIRA;NAGATA KAZUSHI
分类号
H01L21/30;H01L21/027
主分类号
H01L21/30
代理机构
代理人
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地址
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