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发明名称
DIFFUSION FURNACE
摘要
申请公布号
JPH03185719(A)
申请公布日期
1991.08.13
申请号
JP19890325126
申请日期
1989.12.14
申请人
NEC CORP
发明人
DAIMON TADASHI
分类号
H01L21/205;H01L21/22
主分类号
H01L21/205
代理机构
代理人
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