发明名称 CHIP POSITIONING NIB
摘要 <p>PURPOSE:To obtain a chip positioning nib with improved wear-resistance property on a working surface and enabling to maintain positional accuracy after use for a long period of time by coating the working surface of a base which is in contact with chip parts with a diamond. CONSTITUTION:In a chip positioning nib 5 for positioning chip parts 1 which are provided at a chip parts fitting machine, a base working surface 5A which is contact with the chip parts 1 is coated with a diamond. For example, metal carbide, metal nitride metal oxide, etc., as well as metal and alloy are used as a material for the positioning nib 5. Then, a diamond film 6 is coated on the working surface 5A which is in contact with the chip parts 1 of the chip positioning nib 5. The diamond film 6 is synthesized by what is obtained by adding hydrogen gas, oxygen gas, as required, or halogen gas to carbon chemical compound such as carbon monoxide gas and methane gas as a raw material gas and by the thermal filament method, DC plasma CVD method, high-frequency plasma CVD method as a deaeration method.</p>
申请公布号 JPH03184357(A) 申请公布日期 1991.08.12
申请号 JP19890323265 申请日期 1989.12.13
申请人 IDEMITSU PETROCHEM CO LTD 发明人 TSUBOKAWA MASAYA;MIZUNO HIROMI;KAZAHAYA TOMIO;ITO TOSHIMICHI
分类号 H01L21/68 主分类号 H01L21/68
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