QUARTZ TUBE AND ITS MANUFACTURING METHOD FOR MANUFACTURE OF SEMICONDUCTOR DEVICE

摘要

Quartz tube for diffusion processing comprises a large number of projecting part formed by appling a presure at inner side of quartz tube (100). The annealing treatment is used to remove the inner stress after forming a projecting part (100'). Annealing temperature is 1215 deg.C. This provides the advantage for preventing the bend by heating wire of electric furnace.