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经营范围
发明名称
SPUTTERING APPARATUS
摘要
申请公布号
JPH03183122(A)
申请公布日期
1991.08.09
申请号
JP19890322075
申请日期
1989.12.12
申请人
FUJI ELECTRIC CO LTD
发明人
KONDO KENJI
分类号
C23C14/35;H01L21/203
主分类号
C23C14/35
代理机构
代理人
主权项
地址
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