摘要 |
PURPOSE:To detect the plated thickness inside an opening part by a method wherein a conductive film adjacent to the peripheral edge of the opening part in an insulating film is connected to an anode by a wire and an electric current flowing in the wire is detected. CONSTITUTION:An anode member 11 is connected to a conductive resin film 8 by a wire l3; an ampere meter 13 is installed in the wire l3. When an electrolytic plating operation is executed by using a direct current in which a metal film 3 for electricity application use is used as a cathode and the anode member 11 is used as an anode, a plated film A is grown on the metal film 3 for electricity application use. When the film thickness of the plated film A reaches the film thickness of a resist film 5 and the plated film A comes into contact with a sidewall of an opening part 8a in the conductive resin film 8, an electric current flows in the metal film 3 for electricity application use directly from the anode member 11 via the wire l3, the conductive resin film 8 and the plated film A; the electric current is detected by using the ampere meter 13. At this time, the supply of the electric current from a power supply 12 is stopped and the plating operation is finished. Thereby, the plated film A becomes a protruding electrode 7 of a prescribed film thickness which is nearly equal to the film thickness of the resist film 5. |