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发明名称
THIN FILM FORMING DEVICE AND THIN FILM FORMING METHOD USING THIS DEVICE
摘要
申请公布号
JPH03183766(A)
申请公布日期
1991.08.09
申请号
JP19890320825
申请日期
1989.12.11
申请人
CANON INC
发明人
KUROKAWA TAKESHI
分类号
C23C14/56;C23C16/44;H01L21/205;H01L21/31
主分类号
C23C14/56
代理机构
代理人
主权项
地址
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