| 摘要 |
PURPOSE:To rotate a sample with high accuracy within a fine-angle range by transmitting the fine movement of the operation point of a lever means to a theta rotary shaft through a holding member and a theta rotary shaft driving means which is fixed thereupon, and rotating the shaft. CONSTITUTION:When the force point 72 of an arm 72 which constitutes the lever means is driven by a driving means (driving pin 76 and driving motor 76a), the holding member is rotated around the theta rotary shaft through the operation point 71 and a locking bar 73. Consequently, the theta rotary shaft driving motor 5 fixed on the member 76 is also rotated. The motor 5 has its power coupled with the rotary shaft through a worm 51 and a worm wheel 22. The rotary shaft 2 is therefore rotated by the same angle with the member 6. When the distance from the force point 72 to a fulcrum 75 is set larger than the distance from the operation point 71 to the fulcrum 75, the movement distance of the operation point 71 is obtained by reducing the distance of the force point 72 and the operation point 71 can be moved by a fine quantity. Consequently, the rotary shaft 2, i.e. a sample 1 fixed thereupon can be rotated by a fine angle with high accuracy. |
