发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR ITS MANUFACTURE
摘要 A semiconductor device has a substrate and an active layer (5) of silicon arranged on the substrate, in which active layer the active parts of the device are formed. Between the substrate (1) and the active layer (5), a layer (3) of diamond is arranged and between the diamond layer and the active layer, a layer (4) of silicon dioxide is arranged.
申请公布号 WO9111822(A1) 申请公布日期 1991.08.08
申请号 WO1991SE00029 申请日期 1991.01.17
申请人 ASEA BROWN BOVERI AB 发明人 SVEDBERG, PER
分类号 H01L27/12;H01L21/02;H01L21/20;H01L21/762 主分类号 H01L27/12
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