ELECTRON EMISSION ELEMENT, AND DISPLAY UNIT AND ELECTRON BEAM PLOTTING DEVICE USING THIS ELEMENT

摘要

PURPOSE:To improve reproducibility of an emitter shape and manufacture an electron emission element in a simple process by forming a conical electrode in plurality of hollow parts formed in an insulation layer respectively and forming an opening in respective hollow parts. CONSTITUTION:An SiO2 layer 2 as an insulation layer is formed on an n-type GaAs substrate 1 and an ion beam is spot-implanted into the layer 2. The layer 2 is treated with an acid to selectively etch the ion-implantation part and a hole 5 waterdrop-shaped is formed. W (tungsten) is spattered on the layer 2 to form a gate electrode 3 and a conical emitter 4 and an electron emission element is finished.