| 摘要 |
PURPOSE:To enhance the processability and productivity of a sensor and to enhance reliability over a long period of time by reducing the irregularity of characteristics by simultaneously forming a spiral diffusion hole at the time of the adhesion of a spiral spacer, a solid electrolyte substrate and a seal substrate. CONSTITUTION:Electrode films 6 are formed to both surfaces of an oxygen ion conductive solid electrolyte substrate 5 according to a baking method and a glass film 7 is formed to the part having no electrode film 6 of one surface thereof according to the baking method and a spiral spacer 8 whose start and terminal ends mutually have an interval is formed to the glass film 7 according to the baking method and, further, a seal substrate 9 is arranged through the glass film 7a and the constituted matter is reheated at the baking temp. of the spiral spacer 8 to fix the solid electrolyte substrate 5 and the seal substrate 9 to form a spiral diffusion hole 10. Oxygen passes through the spiral diffusion hole 10 to diffuse to the electrode films 6. Since the diffusion hole 10 is formed in parallel to the solid electrolyte substrate 5 by this method, the penetration of dust or foreign matter in the spiral diffusion hole 10 is prevented and reliability can be enhanced over a long period of time. |
