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发明名称
METHOD AND DEVICE FOR THE MICROWAVE-PLASMA ETCHING
摘要
申请公布号
EP0390004(A3)
申请公布日期
1991.08.07
申请号
EP19900105666
申请日期
1990.03.26
申请人
ANELVA CORPORATION;NIPPON ELECTRIC CO. LTD.
发明人
SAMUKAWA, SEIJI C/O NEC CORPORATION;SASAKI, MASAMI C/O ANELVA CORP.;MORI, SUMIO C/O ANELVA CORP.
分类号
H01L21/302;H01J37/32;H01L21/3065;(IPC1-7):H01J37/32;H05H1/46
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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