| 摘要 |
<p>PURPOSE:To rapidly, remove moisture in a system with a drying agent, to prevent the contamination of a semiconductor, etc., by fine powder from the drying agent and to absorb acidic gas in a vessel by supporting a hygroscopic org. substance such as glycerol on a base material such as paper or cloth and using a basic substance in combination. CONSTITUTION:An org. compd. contg. hydroxyl and/or amino groups, having about <=10<4>cPs viscosity at <=100 deg.C and reducing relative humidity in a system to <=50%, e.g. polyol such as glycerol or amino-alcohol is used as a hygroscopic org. substance and supported on a carrier. A base material such as paper, synthetic paper, nonwoven fabric, mix-screened paper or cloth is preferably used as the carrier so as to increase the rate of moisture absorption and to retain a sheet shape. An inorg. or org. basic substance such as triethanolamine is used in combination so as to render acidic substance absorbing function. When the resulting sheetlike drying agent is used, moisture, acidic gas, etc., in a system can be removed without contaminating a semiconductor in the system.</p> |
