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发明名称
MANUFACTURE OF SEMICONDUCTOR SUBSTRATE
摘要
申请公布号
JPH03181132(A)
申请公布日期
1991.08.07
申请号
JP19890321119
申请日期
1989.12.11
申请人
SONY CORP
发明人
SHIMANOE MUNEHARU;SATO HIROSHI;NIEDA AKIRA;MATSUSHITA TAKESHI
分类号
H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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