PARTIAL THIN FILM FORMING DEVICE,申请号JP19890319587-传众专利搜索

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发明名称	PARTIAL THIN FILM FORMING DEVICE
摘要
申请公布号	JPH03180463(A)	申请公布日期	1991.08.06
申请号	JP19890319587	申请日期	1989.12.08
申请人	NIPPON TELEGR & TELEPH CORP <NTT>	发明人	NISHI NORIO;UEOKA YASUSHIGE;KATO KUNIHARU
分类号	C23C14/04	主分类号	C23C14/04
代理机构		代理人
主权项
地址

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