发明名称 |
Method of spin coating a solution of partially fluorinated polyamic acid polymer and cycloaliphatic ketone solvent |
摘要 |
In humid atmospheres (e.g., 55% relative humidity or above) solutions of 2,2-bis(3,4-dicarboxyphenyl)hexafluoropropane dianhydride/2,2-bis[4-(aminophenoxy)phenyl]hexafluoropropane polyamic acid polymers tend to be unstable in the sense that during spin coating operations undesirable precipitate formation may occur on the rotating surface of a semiconductor wafer. The result is the formation of unacceptable coatings due to their irregularity and lack of uniformity. Described is a method of spin coating solutions of these polyamic acid polymers in a solvent containing one or more cycloaliphatic ketones, such that the solution (a) contains on a weight basis from about 5% to about 40% of the polyamic acid and (b) does not undergo precipitate formation during spin coating in an atmosphere of up to at least about 55% relative humidity.
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申请公布号 |
US5037673(A) |
申请公布日期 |
1991.08.06 |
申请号 |
US19900586192 |
申请日期 |
1990.09.21 |
申请人 |
ETHYL CORPORATION |
发明人 |
EISENBRAUN, ALLAN A.;BLOCKER, WESLEY C. |
分类号 |
C08G73/10;C08J3/09;C08L79/08;C09D179/08;H01B3/30 |
主分类号 |
C08G73/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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