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发明名称
SEMICONDUCTOR MANUFACTURING DEVICE
摘要
申请公布号
JPH03178125(A)
申请公布日期
1991.08.02
申请号
JP19890318126
申请日期
1989.12.06
申请人
MITSUBISHI ELECTRIC CORP
发明人
ARIMA HIDEKAZU;TOMIKAWA MITSUHIRO
分类号
H01L21/22;H01L21/322
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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