ROTARY COATING METHOD,申请号JP19890318157-传众专利搜索

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发明名称	ROTARY COATING METHOD
摘要
申请公布号	JPH03178371(A)	申请公布日期	1991.08.02
申请号	JP19890318157	申请日期	1989.12.07
申请人	SONY CORP	发明人	IKEDA RIKIO
分类号	G03F7/16;B05D1/40;H01L21/027	主分类号	G03F7/16
代理机构		代理人
主权项
地址

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