| 摘要 |
PURPOSE:To prevent the generation of excessively high voltage and noise, and obtain a gas laser oscillation equipment of high reliability, by making the switching frequency variable, and keeping the input voltage constant for a high voltage high frequency transformer. CONSTITUTION:At a frequency near the resonance frequency of a resonance coil 20 and a resonance capacitor 21, a high frequency switching element 15 is subjected to frequency control in the manner in which the input voltage of a high voltage high frequency transformer 17 becomes constant. Thereby the relation between the resonance frequency of the resonance coil 20 and the resonance capacitor 21 and the input voltage of the high voltage high frequency transformer 17 are uniquely determined. The output voltage of a DC smoothing circuit 14 on the low voltage side is previously detected by a voltage detecting element 19, and the switching frequency is changed by a control circuit 16 of the high frequency switching element 15, thereby keeping the input voltage of the high voltage high frequency transformer constant. Hence the generation of excessively high voltage and noise caused by the input voltage fluctuation of a high voltage power supply is restrained, and a gas laser oscillation equipment of high reliability can be obtained. |
