TEMPERATURE AND HUMIDITY CONTROLLING DEVICE

摘要

PURPOSE:To efficiently control temp. and humidity by passing the gas whose temp. and humidity are controlled through a dehumidifying means made of material which does not permeate moisture and producing the dehumidified gas and thereafter controlling the humidity and the temp. of this dehumidified gas to the prescribed value. CONSTITUTION:For example in a temp. and humidity controlling device 20 in a resist coating applicator, the gas whose temp. and humidity are controlled is passed through a dehumidifier 22 made of material (e.g. membrane filter 31) which does not permeate moisture. Dehumidified gas is produced. The humidity and temp. of the dehumidified gas are controlled to the prescribed value by a temp. controller 23 and a humidifier 24. As a result, a temp. and humidity controlling device can be obtained which is miniaturized and simple in the constitution and equipped with the efficient dehumidifier.