| 摘要 |
PURPOSE:To form a thin film in good workability with high accuracy by reducing turn-around influence, by controlling the space between a flight source of particles comprising a thin film constituting substance, and making particle streams toward a substrate parallel. CONSTITUTION:For example, a blocking plate 24 with a slight 23 is provided between a flight source 20 of particles comprising a thin film constituting substance and the opposedly arranged substrate 11 and only prescribed particles 21 are selected to be guided to the substrate 11. The particles 21 guided onto the substrate 11 are deposited only onto the surface or outer surface of the substrate 11 and the turn-around thereof is prevented. As a result, a thin film is formed in good workability with high accuracy. |
