PULLING DEVICE OF SILICON SINGLE CRYSTAL,申请号JP19890313378-传众专利搜索

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发明名称	PULLING DEVICE OF SILICON SINGLE CRYSTAL
摘要
申请公布号	JPH03177389(A)	申请公布日期	1991.08.01
申请号	JP19890313378	申请日期	1989.12.04
申请人	NIPPON STEEL CORP;NITTETSU DENSHI KK	发明人	YAMAUCHI TAKESHI;SHINOYAMA SEIJI;TAKAO SHIGEYOSHI;MEGURO SEIZO
分类号	C30B15/00;C30B29/06;H01L21/208	主分类号	C30B15/00
代理机构		代理人
主权项
地址

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