VERFAHREN ZUR NASSCHEMISCHEN BEHANDLUNG VON HALBLEITEROBERFLAECHEN UND LOESUNG ZU SEINER DURCHFUEHRUNG,申请号DE19904002327-传众专利搜索

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发明名称	VERFAHREN ZUR NASSCHEMISCHEN BEHANDLUNG VON HALBLEITEROBERFLAECHEN UND LOESUNG ZU SEINER DURCHFUEHRUNG
摘要
申请公布号	DE4002327(A1)	申请公布日期	1991.08.01
申请号	DE19904002327	申请日期	1990.01.26
申请人	WACKER-CHEMITRONIC GESELLSCHAFT FUER ELEKTRONIK-GRUNDSTOFFE MBH, 8263 BURGHAUSEN, DE	发明人	FABRY, LASZLO, DIPL.-CHEM. DR., 8261 EMMERTING, DE;SCHNEGG, ANTON, DIPL.-CHEM. DR., 8263 BURGHAUSEN, DE;NUSSSTEIN, PETER, DIPL.-CHEM. DR., 8000 MUENCHEN, DE;VALUCH, GERTRUD, 8263 BURGHAUSEN, DE
分类号	H01L21/304;H01L21/306	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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