Rapid spectral analysis of recurring signal - by detecting, modulation and mixing of sec. signal caused by exposing integrated circuit to prim. beam

摘要

The rapid spectral analysis of a repeating signal at at least one point on a specimen (IC) involves exposing the specimen to a primary beam (PE) and deriving a secondary signal (SS) resulting from the interaction between the beam and specimen. The primary beam, secondary beam, secondary partic. flow (SE), or secondary signal processing device is modulated by a modulation freq.. Part of the spectrum of the repeating signal in the secondary signal is mixed into a lower intermediate freq. plane and the secondary signal is ubjected to spectral analysis. USE/ADVANTAGE - Simple, cost-effective spectral signal analysis for functionally testing highly integrated circuits.