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发明名称
MONOLITISCH INTEGRIERTE MIKROWELLENSCHALTUNGSANORDNUNG.
摘要
申请公布号
DE3679928(D1)
申请公布日期
1991.08.01
申请号
DE19863679928
申请日期
1986.04.03
申请人
FUJITSU LTD., KAWASAKI, KANAGAWA, JP
发明人
HIRACHI, YASUTAKE, MUSASHINO-SHI TOKYO 180, JP
分类号
H01L29/812;H01L21/331;H01L21/338;H01L21/822;H01L27/00;H01L27/04;H01L27/06;H01L29/205;H01L29/68;H01L29/73;H01L29/737;(IPC1-7):H01L27/06
主分类号
H01L29/812
代理机构
代理人
主权项
地址
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