| 摘要 |
PURPOSE: To manufacture the expansion array of a subs unit that is accurately prescribed by forming a series of alignment patterns on the upper surface of an alignment substrate by light and positioning it to an alignment pattern formed on the sub unit. CONSTITUTION: In an alignment substrate 20, a dry film resist is laminated on a substrate that has been punched and polished, a pattern is formed by light, and the pattern of a key groove with a vacuum hole 26 positioned accurately in the pattern of the key groove 22 is created. Also, a key 32 is formed on a surface 34 of the integrated circuit of a sub unit of a simple substance, using light by the pattern formation method. Then, a sub unit 30 of a single body is placed on the alignment substrate 20, is positioned accurately using the key 32 and the key groove 22, and then the sub unit 30 of the single body is positively retained at a specific position, by applying vacuum through the vacuum hole 26, thus enabling an expansion array to have a series of coplanar integrated circuits. |
