Process of fabricating field effect transistor with LDD structure.

摘要

For formation of the LDD structure with stable impurity profiles, a first ion-implantation using a gate electrode (25) as a mask is carried out through a gate oxide film (22) for doping the semiconductor substrate (21) with impurity atoms, covering the entire surface of the structure with a doped polysilicon film overlain by a protective oxide film, covering the protective oxide film with an intentionally undoped polysilicon film, anisotropically etching the intentionally undoped polysilicon film for forming a side wall (28a) on both sides of the side wall, removing exposed portions of the protective oxide film, carrying out a second ion-implantation using the gate electrode and the side wall as a mask for doping the semiconductor substrate with impurity atoms of again, thereby forming heavily doped impurity regions (21b) partially overlapped with lightly doped impurity regions (21a).