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发明名称
A SPUTTERING APPARATUS
摘要
申请公布号
EP0431592(A3)
申请公布日期
1991.07.31
申请号
EP19900123314
申请日期
1990.12.05
申请人
CASIO COMPUTER COMPANY LIMITED
发明人
SHIOTA, JUNJI, C/O PATENT DEP., HAMURA R&D;OHNO, ICHIRO, C/O PATENT DEP., HAMURA R&D;UCHIUMI, HIDETAKA, C/O PATENT DEP., HAMURA
分类号
C23C14/35;H01J37/34;H01L21/203;H01L21/285;(IPC1-7):H01J37/34
主分类号
C23C14/35
代理机构
代理人
主权项
地址
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