METHOD TO DELIVER ULTRA HIGH PURITY HELIUM GAS TO A USE POINT

摘要

A method to deliver helium gas to a use point which comprises: (A) providing gaseous helium (24) into a storage container (8) containing cold helium; (B) passing the gaseous helium in heat exchange relation with the cold helium to: (i) warm cold helium, (ii) increase or maintain the helium pressure, and (iii) condense and/or solidify impurities out of the gaseous helium; (C) withdrawing (4) ultra high purity helium gas comprising resulting warmed helium and cleaned gaseous helium from the storage container; and (D) providing (12) ultra high purity helium gas to a use point without need for further pressurization, the helium gas containing less than 10 ppm impurities. g