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发明名称
METHOD OF HEAT TREATMENT OF SILICON WAFERS
摘要
申请公布号
SU743489(A1)
申请公布日期
1991.07.30
申请号
SU19762351755
申请日期
1976.04.17
申请人
SHAPOVALOV V.P.,SU
发明人
SHAPOVALOV V.P.,SU
分类号
H01L21/324;H01L21/477
主分类号
H01L21/324
代理机构
代理人
主权项
地址
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