| 摘要 |
PURPOSE:To make the useless waiting time of a mask required for processing short by retrieving the place of the mask of a selected lot with the aid of a controller provided with a lot selection means and a mask retrieval means and instructing the cleaning order of the respective masks on a cleaning process. CONSTITUTION:The controller 6 controls the data of a lot in process at pre- process places 2 - 4 and an virgin lot in a PEP (a photo Engraving Process) and a data of the whole mask positions. Besides, it is provided with the lot selection means which selects a lot which should be PEP-processed from the object lots and the mask retrieval means corresponding to the processing lot selected by the lot selection means. In the case an output device 11 exists at the place 5 of the cleaning process and the desired mask exists at the place 5, the cleaning mask is instructed by the device 11 so that the mask already cleaned is returned to a control shelf 7 in preferential order by the controller 6. Therefore, the lot which is processed, next and the mask used for it are prepared before the processing of a PEP processor 8 is finished. Thus, the waiting time of the processor 8 is reduced and the required time is made short. |
