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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH03175638(A)
申请公布日期
1991.07.30
申请号
JP19890315783
申请日期
1989.12.04
申请人
NEC CORP
发明人
KOBAYASHI KAZUMI
分类号
H01L21/322
主分类号
H01L21/322
代理机构
代理人
主权项
地址
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