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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH03173131(A)
申请公布日期
1991.07.26
申请号
JP19890310631
申请日期
1989.12.01
申请人
HITACHI LTD
发明人
TATEFURU NOBORU;INABA KEIZO
分类号
H01L21/225;H01L21/322;H01L21/336;H01L29/78
主分类号
H01L21/225
代理机构
代理人
主权项
地址
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