MANUFACTURE OF SEMICONDUCTOR THIN FILM,申请号JP19890314017-传众专利搜索

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发明名称	MANUFACTURE OF SEMICONDUCTOR THIN FILM
摘要
申请公布号	JPH03173417(A)	申请公布日期	1991.07.26
申请号	JP19890314017	申请日期	1989.12.01
申请人	RICOH CO LTD	发明人	KOSAKA DAISUKE
分类号	H01L21/20;H01L21/263;H01L21/268	主分类号	H01L21/20
代理机构		代理人
主权项
地址

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