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发明名称
ION IMPLANTATION DEVICE AND ION IMPLANTATION
摘要
申请公布号
JPH03173424(A)
申请公布日期
1991.07.26
申请号
JP19890313927
申请日期
1989.12.01
申请人
FUJITSU LTD
发明人
MATSUO JIRO
分类号
H01J37/317;H01L21/265
主分类号
H01J37/317
代理机构
代理人
主权项
地址
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