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发明名称
PLASMA VAPOR GROWTH APPARATUS
摘要
申请公布号
JPH03173124(A)
申请公布日期
1991.07.26
申请号
JP19890312626
申请日期
1989.11.30
申请人
SHIMADZU CORP
发明人
IKUJI NOZOMI
分类号
H01L21/205;H01L31/04
主分类号
H01L21/205
代理机构
代理人
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地址
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